A roots vacuum pump is a vacuum pump that compresses and exhausts by
ounter-rotating two-lobed rotors.
This mechanical vacuum pump is also referred to as a mechanical booster when it is mounted to the front end of an oil-sealed rotary vacuum pump to increase the volume flow rate.
A roots vacuum pump is normally used with a vacuum pump that can compress up to atmospheric pressure
RA100 ～ R12001
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● No lubricating oil in the suction chamber of the pump.
→ Low power consumption, produce a clean vacuum.
● Improves the ultimate pressure of backing pump by one or two figures.
● Free from performance degradation even in the take ofcondensable gas.
● Strong rotary shaft.
→ Enables start-up and continuous operation in low vacuum.
● Optimal motor capacity can be selected to fit the specific load.
→ Less equipment cost, less operation cost.
● Wide range of pump speed lineup.
● Work with various backing pumps.
→Roots＋oil-sealed rotary, liquid-ring
Semiconductor, Electronics Industry: Vapor Deposition, Spattering, Ion Implantation, High Temperature Dry Exhaust,
Single-crystal Pulling, Plasma Treatment
Nuclear Energy Development Research: Particle Accelerator, Nuclear Fusion Experiment, Material Metallurgy Welding,
Welding, Vacuum Insulation
Science & Engineering: Mass Spectrometry, X-ray Diffraction, Wind-tunnel Experiment, Cryogenic
Automobile, Machinery, Aircraft Industry: Precision Casting, Brazing, Welding Beam Process, Hardening, Tempering,
Nitriding, Sintering, Laser beam machine, Inert Gas Replacement
Heavy Electrical Equipment: Exhausting, Drying, Impregnation
Optical Industry: Vapor Deposition, Spattering
Steel, metal industry: Dissolution Casting, Degassing, Refinement, Sintering, The Metal Distillation
Chemistry, Pharmaceutical industry: Distillation, Evaporation, Concentration, Drying, Freeze-drying, Crystallization,
Sublimation, Humidification , Sterilization
Food Industry: Concentration, Drying, Freeze-drying, Rapid cooling
Metalworking Industry: Heat Treating, Casting, Brazing, EB Welding, Vapor Deposition, Ion Nitriding
Energy connection: Solar Battery Manufacture
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