This thermocouple-built-in micro ceramic heater has an R-type thermocouple directly embedded into the ceramic substrate. As it has a built-in temperature sensor, the temperature of the heater is controlled with high accuracy.
Hitachi, Ltd.Gr, Toshiba Corporation Gr, Panasonic Corporation Gr, Canon Inc. Gr, NEC Corporation Gr, Fujitsu Limited Gr, Ministry of Defense, Mitsubishi Electric Corporation Gr, Sony Corporation Gr, High Energy Accelerator Research Organization, Japan Atomic Energy Agency, University Laboratory each, etc. Asahi Glass Co., Ltd., Ishikawajima-Harima Heavy Industries Co., Ltd., Canon Inc., Dainippon Screen Mfg. Co., Ltd., Sony Corporation, Toshiba Corporation, Hitachi, Ltd., Matsushita Electric Industrial Co., Ltd.